Title: Atomic Layer Deposition of NbN thin films for SRF applications
Author: Larry Phillips
Institution: Jefferson Lab – Newport News – Virginia
Abstract: Niobium Nitride is a 17K superconductor investigated since early eighthies for Superconducting Radiofrequency applications.
Atomic Layer deposition is instead a technique that only recently starts to be considered for industrial applications.
Presentation:
Phillips – Atomic Layer Deposition of NbN Thin Films for Superconducting Radiofrequency (SRF) Accelerator Technology from thinfilmsworkshop
Video: