Title: ENERGETIC DEPOSITION OF NIOBIUM FILMS FOR SUPERCONDUCTING RF CAVITIES USING HIGH POWER IMPULSE MAGNETRON SPUTTERING
Author: Andre Anders
Institution: Lawrence Berkeley National Laboratory
Abstract: André Anders
Lawrence Berkeley National Laboratory, Berkeley, California
Niobium coatings on copper cavities have widely been seen as a cost-efficient replacement of bulk niobium cavities, however, niobium coatings made by sputtering and other techniques have not lived up to expectations. Energetic condensation from the plasma phase has been tried using filtered cathodic arc, which is difficult given macroparticle filter and cavity geometries. High power impulse magnetron sputtering is a promising alternative technology. In this contribution, a cavity coatings concept with HIPIMS is explained, and preliminary data on niobium HIPIMS and resulting coatings are presented. One of the finding was the superior adhesion of niobium films on aluminum (with its native oxide), which suggest that cavities should be made from aluminum.
This work was supported by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.