Sputtering niobium films into a RFQ model & Sputtering of superconducting V3Si film-Foreign Institute Thesis ZHANG YAN

Author: ZHANG YAN ; Type of thesis: Foreign Institute Thesis
Abstract: Superconducting technique has been widely applied to linac particle accelerators for more than two decades. Cryogenic RF performance of SC cavities has been improved a lot due to improvement on purification of SC material, as well as SC cavity design, fabrication and surface treatment techniques. The Sputtering technique of SC cavities provided another chance to particle accelerators: the cost of cavity fabrication greatly decreased, while the performances of sputtering coated niobium cavities are competitive with those of bulk material SC cavities.
In this thesis some important features of RF cavities are briefly introduced; the difference in design of a SC cavity and that of a normal conducting cavity are indicated. The design parameters of a 144 MHz SC QWR and an 1.5GHz monocell spherical cavity are presented. The SC material for cavity fabrication, and measurement method of SC cavity are introduced, then the fabrication and surface treatment technique of SC cavities are discussed.
The application of sputtering technique in SC cavities is a recent development of SRF technique. After nearly two decades study, the sputtering coated niobium film SC cavities achieved a cryogenic RF performance close to that of bulk niobium cavities. The thesis introduced various sputtering techniques on this purpose from preliminary glow discharge, discusses the LNL, Peking University and Australia National University’s QWR sputtering configurations, and introduces LNL’s surface treatment technique for copper substrate cavity.
In the study of niobium sputtering for 1.5GHz monocell spherical cavity, different magnetron configurations were tried and measured a large amount of sputtered niobium samples. By improving the magnetron configuration and surface treatment technique of the substrate cavity, sputtered niobium cavities with better RF performance were obtained. It was found out that substrate surface treatment takes a very important role in the sputtering of a SC cavity, as sample measurement cannot give out helpful information of the RF performance, the study with substrate

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